Lithography & Pattern Transfer
Electron-beam lithography, photolithography, direct-write and DUV-patterned processing, combined with dry etching, ion milling, lift-off, and feature-transfer optimization.
Explore nanofabrication →Nanofabrication • Semiconductor Processing • Quantum Devices
I develop, integrate, and troubleshoot nanoscale fabrication processes for semiconductor and quantum devices, with expertise in lithography, plasma etching, thin-film deposition, metrology, and process optimization.
Expertise
My experience spans nanoscale patterning, plasma processing, thin-film deposition, metrology, process integration, and troubleshooting across semiconductor and quantum-device fabrication.
Electron-beam lithography, photolithography, direct-write and DUV-patterned processing, combined with dry etching, ion milling, lift-off, and feature-transfer optimization.
Explore nanofabrication →ALD, PECVD, RF/DC sputtering, e-beam and thermal evaporation, pulsed laser deposition, thermal processing, and multilayer integration for functional device structures.
Explore thin films →Development and refinement of complex multi-step fabrication flows with emphasis on reproducibility, process windows, yield improvement, root-cause analysis, and corrective actions.
SEM, AFM, profilometry, ellipsometry, reflectometry, XRD, structural analysis, electrical transport, and low-temperature characterization used to validate process outcomes.
Explore characterization →Experience
In industry, I have worked across complex GaN-based microLED fabrication flows involving lithography, dry etching, dielectric passivation, metallization, thin-film deposition, thermal processing, metrology, and device integration.
My work has included process optimization, troubleshooting yield-limiting failure modes, evaluating alternative process approaches, and coordinating fabrication across multiple cleanroom facilities.
During my PhD in condensed matter physics, I developed and characterized superconducting thin films and nanoscale devices for quantum-transport experiments.
This work combined epitaxial thin-film growth, lithography, nanofabrication, structural characterization, and low-temperature electrical measurements, giving me a strong foundation at the intersection of materials science, device physics, and fabrication.
Technical Capabilities
Electron-beam lithography, photolithography, direct-write lithography, DUV-patterned processing, lift-off, and nanoscale pattern definition.
ICP-RIE, RIE, ion milling, wet etching, plasma-process optimization, profile control, and material-selective pattern transfer.
ALD, PECVD, RF/DC sputtering, e-beam evaporation, thermal evaporation, PLD, and thermal processing.
Process development, integration, yield improvement, root-cause analysis, SEM, AFM, profilometry, ellipsometry, reflectometry, and XRD.
Research & Writing
My academic research focuses on unconventional superconductivity, quantum transport, electron-doped cuprates, superconducting thin films, and nanoscale devices.
PhD in Condensed Matter Physics
I write about nanofabrication, electron-beam lithography, semiconductor processing, superconductivity, and experimental physics.
Read my articles →I am interested in advanced nanofabrication, semiconductor processing, quantum-device fabrication, and process integration.